Category: Process Subcategory: Rapid Thermal Processing
Manufacturer: AG Associates Model: AW 610
Equipment Name: AG Heat Pulse 610 Configuration: up to 6" diameter
Year: 2012 Condition: Excellent
Quantity: 2 Availability: In Stock, Immediately
AG Associates AG610 RTP system with upgraded Windows OS with Alwin21 Software Accu Thermo AW 610 RTP system Aluminum chamber with water cooling and gold plating Isolated Quartz Tube without window Oven control board and main control board Bottom and top heating with 21 (1.2KW ea) Radiation heating lamp modules 4 bank zones (Top, Front, Rear, & Bottom). Quartz Tray for 3-6 inch round wafer One gas line with one MFC without shut-off valve. Computer with Alwin21 Software, 17” LCD Monitor, Mouse, Standard Keyboard T Shape Quartz with TC and one holder for 100-800°C One USB with original Software backup 208V, 60Hz, 50A 3 phase Neslab RTE7 Chiller
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