Category: Metrology Subcategory: Resistivity, Stress & Mapping
Manufacturer: KLA-Tencor Model: Alpha Step 200
Equipment Name: KLA-Tencor Alpha Step 200 Configuration: 0
Year: Condition: Excellent
Quantity: 1 Availability: Immediate, In Stock
Pricing: Call for pricing Movie:
Profilometer Vertical Measurement Ranges: Auto ranging up to +/- 160KA or 160 um –20 to 50A Resolution: Vertical: 5A with +/- 160KA 400A Stylus Radius Standard 12.5um or 5.0um Stylus Tracking Force –adjustable between 1 and 25mg Precision X-Y stage X-Axis 100mm Y-Axis 81mm Z-Axis 21mm Largest sample Size 162mm
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