Category: Process Subcategory: PVD Sputtering Systems
Process Type: PVD Sputtering both DC & RF
Manufacturer: Anelva Model: C-7100GT
Equipment Name: C-7100GT PVD Configuration: 300mm
Year: 2007 Condition: Excellent
Quantity: 1 Availability: Immediately
Description:
Anelva C-7100GT PCM-PVD Sputtering system EFEM RS7000 Load Port with (2) Load Locks - A & B 300mm FOUP Chamber A - Anneal (850C max) Brooks transfer Chamber with Mag7 robot Chamber C - High Rate PCM-PVD module co-sputter with 2 PVD targets (DC/RF), 5KW DC power supply, 13.56MHz - 2KW RF power supply, 3KW match box, 3200L/sec TMP. Chamber E- High Rate PCM-PVD module co-sputter with 2 PVD targets (DC/RF), 5KW DC power supply, 13.56MHz - 2KW RF power supply, 3KW match box, 3200L/sec TMPChamber F - Aligner
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