Category: Process Subcategory: Plasma Etch, Ashing, Desum, RIE & ICP
Manufacturer: PlasmaTechnology Model: RIE
Equipment Name: Plasma Technology RIE Configuration:
Year: Condition: Very good
Quantity: 1 Availability: Immediate, In Stock
Description:
Plasma Technology Table Top RIE Manual controlls (3) MFCs (3) individual process recipes Throttle Valve ENI ACG5 XL RF Power Supply DC bias
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