Category: Process Subcategory: Plasma Etch, Deposition, Ashing, Descum, RIE & ICP
Manufacturer: Oxford Model: 100 plus
Equipment Name: Serial # 219673 Configuration: up to 200mm
Year: Condition: Excellent
Quantity: 1 Availability: Immediate, In Stock
Description:
Oxford 100 Plus RIE system Manual Load lock system Alcatel 600T Turbo pump and controller 13.56MHz RF power supply PLC controller Remote Gas box 208V 25.6A 50/60Hz
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