Category: Metrology Subcategory: Resistivity, Stress & Mapping
Manufacturer: KLA-Tencor Model: Alpha Step 500
Equipment Name: Serial # 0701113860 Configuration:
Year: 2001 Condition: Excellent
Quantity: 1 Availability: 1
KLA-Tencor Alpha Step 500 Profiler Stylus-based surface profiler adjustable between 1 and 100mg Computer controlled Scanning and data collection Comprehensive data analysis software Intuitive user interface Application-specific recipes easily programmed High resolution VGA monitor Zoom optics Multi-scan average mode scans up to 10 times Up to 30 standard surface parameters selections Accurate Surface Characteristic Measurement w/ resolution to 1A 2D step height metrology profiling with guaranteed 10Å (1s) or 0.1% repeatability Enables process control with step height metrology below 50 nm to 300 µm
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