Category: Metrology Subcategory: Critical Dimension & Line Width
Process Type: Critical Dimensions
Manufacturer: Soluris Model: IVS 155
Equipment Name: Soluris IVS 155 Configuration: up to 8" diameter wafer
Year: 2005 Condition: Excellent
Quantity: 1 Availability: Immediate, In Stock
Pricing: Call for Pricing Movie:
Description:
Soluris IVS 155 Critical Dimension and optical Overlay system, Cassette to Cassette, Dual end effector, (3) cassette stations, (5) objectives 10x, 20x, 50x, 100x, Pentium 2.33Mz ISA bus computer,8.4GB harddrive, 115V/60Hz
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