Category: Process Subcategory: RIE
Manufacturer: Plasmatherm Model: Plasmatherm SLR 720 RIE
Equipment Name: Plasmatherm PTI-76636F Configuration: currently 4", will modify
Year: 1999 Condition: Excellent
Quantity: 1 Availability: In Stock, Immediately
Pricing: Call for Pricing Movie:
Description:
Plasmatherm Reactive Ion Etcher Plasma Shuttle-Lock load-lock loading system with platen transfer Model 700 Al Chamber with 11” PC - Window based system. Advanced Energy RFPP 500 watt RF generator with matching network. (2) mechanical pumps, Neslab HX 75 chiller, Leybold 361C turon with Leybold NT 150/360 controler,gas distribution center w/(4)Mass flow controller (BCl3-100,Cl2-50,O2-100,N2-50)installed- Full set of Plasmatherm software & manuals, 208V 3 phase
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