Category: Metrology Subcategory: Surface Contamination
Manufacturer: KLA-Tencor Model: AIT UV Darkfield Defect Inspection Station
Equipment Name: KLA s/n 1048 Configuration: 6 inch (150mm) to 12 inch (300mm)
Year: Condition: Excellent
Quantity: 1 Availability: In Stock, Immediately
Description:
KLA Tencor AIT UV Automated Darkfield Defect Inspection station for Pattern Wafers,More powerfull and greater Sensitivity than previous AIT XP and AIT 2 station,includes 3 Spot Sizes,Standard KLA AIT Operator Interface Monitor,Standard KLA AIT Operator Keyboard, Trackball and Joystick,Standard KLA Media Devices: FD, CD Drives,Windows NT OS,Network Connections,CE Marked
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