Category: Process Subcategory: Mask Aligners & Lithography
Manufacturer: Karl Suss Model: MA56
Equipment Name: 374 Configuration: up to 5" dia. wafers
Year: Condition: Excellent
Quantity: 1 Availability: In Stock, Immediately
Pricing: Call for Pricing Movie:
Karl Suss MA56 topside mask aligner, Resolution: 3 µm (proximity) 0.8-1µm (vacuum contact),Capable of Hard Contact, Soft Contact, and Proximity Exposure Modes - Semi-Automatic operation (Auto Wafer Load/Unload) - 350W Lamphouse ,350 Watt CIC500 power supply- Splitfield Microscope
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