Category: Process Subcategory: Plasma Etch, Ashing, Desum, RIE & ICP
Manufacturer: Plasmatherm Model: SLR ECR - Plasmatherm
Equipment Name: Plasmatherm PTI 75088F Configuration: Microwave
Year: May 13, 1996 Condition: Excellent
Quantity: 1 Availability: In Stock, Immediately
Pricing: Call for Pricing Movie:
Description:
Plasmatherm ECR microwave etcher Astex model AX2100 -1000W Micorwave generator,Astex 27V, 185 amp ECR power supply, Astex 20V, 125amp ECR power supply,currently set up for 2-8" wafers,Neslab TU-1 chiller, Leybold D65BCS, D16B, RFPP RF5S power supply with AM-5,MKS 286 controller,MKS 290 Ion gauge controller,VAT PM5 Pressure Controller, (6) MFC - CL2,Ar,O2,N2,O2,CF4, N2 purge 208V, 3phase 60amp
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