Category: Process Subcategory: Spin Rinse Dryers, Wafer cleaning, Magasonic Cleaners
Manufacturer: Semitool Model: Spectrum
Equipment Name: 163846 Configuration: 150 - 300mm wafers
Year: 2000 Condition: Excellent
Quantity: 1 Availability: In Stock, Immediately
Pricing: Call for Pricing Movie:
Description:
Fully automated Spray Solvent batch wafer chemical system, configuration is (SP-W-200-SSC-SSC), 8 tanks (4 which are heated), 2 Cabinet/Spray Solvent modules - each module consist (1) CPC Chemcial Process Chamber with 2 Chemicals in (2) Heated 5 gallon tanks, and (1) SRD Spin Rinse/Dryer, system in enclosed in a Class 2 Mini-environment, 4 axis linear track robot
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