Category: Process Subcategory: Plasma Etch, Ashing, Desum, RIE & ICP
Manufacturer: Oxford Model: 90 Plus RIE
Equipment Name: 9077537 Configuration: 2-8"
Year: 1997 Condition: excellent
Quantity: 1 Availability: In Stock, Immediately
Pricing: Call for Pricing Movie:
Description:
Reactive Ion Etcher Load lock & main process chamber 6 MFCs -(BCl3, Cl2, CH4, H2, Ar, O2),Pfeiffer Turbo TPH330PC on the Main chamber,Pfeiffer Turbo TMH 260C on the Load Lock,Leybold mechanical pumps, PC & monitor.
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