Category: Process Subcategory: Plasma Etch, Ashing, Desum, RIE & ICP
Manufacturer: Plasmatherm Model: SLR 720 RIE Plasmatherm
Equipment Name: Plasmatherm PTI76582F Configuration: 6"
Year: May, 20, 1996 Condition: Excellent
Quantity: 1 Availability: In Stock, Immediately
Pricing: Call for Pricing Movie:
Description:
Plasmatherm SLR 720 RIE,700 series Aluminum Chamber with load lock, 11" bottom electrode,MKS 286 controller,six zone heated chamber,MKS 290 Ion Gauge controller,Lebyld 360 turbo w/150/360 controller, Advance Energy RFPP 5S RF power supply w/AM5 matching network,Gas configuration (4) MKS 1159 MFCs-(50,100,100,200 sccm),Plasmatherm Windows OS, 208V,3 phase,60 Hz.
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