Category: Process Subcategory: Deposition - PECVD
Manufacturer: Plasmatherm Model: Plasmatherm SLR 730 PECVD
Equipment Name: Plasmathemr PTI 76599F Configuration:
Year: 1997, , , , , , Condition: Excellent
Quantity: 1 Availability: In Stock, Immediately
Pricing: Call for Pricing Movie:
Description:
Plasmatherm Shuttle-Lock load-lock loading system with platen transfer Model 700 Al Chamber for PECVD deposition, 2-8" platten,13inch top electrode,Watlow 250 degrees C heater, RF5S RF power supply with AM5 matching network, (8) MKS model 1179 MFCs -N2O,N2,NH3,N2,He, SF6,Silane 2% in He,Silane 1.9% in He,Neslab HX 75 chiller, Plasmatherm Windows OS, 208V, 3 Phase 60amp
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