Category: Process Subcategory: Plasma Etch, Ashing, Desum, RIE & ICP
Manufacturer: Plasmatherm Model: 700 VLR (Versalock) RIE Plasmatherm
Equipment Name: Plasmatherm PTI 77058F Configuration:
Year: Sept. 15, 1997 , Condition: Excellent
Quantity: 1 Availability: In Stock, Immediately
Pricing: Call for Pricing Movie:
Description:
Plasmatherm Versalock RIE System with (1) LM/TM module (2) RIE module - 5 MKS Mass Flow Controllers (O2, CL2, Ar,CF4,CHF3) RFPP-RF10S RF power supply, Leybold DryVac 50P Leybold 361C turbo with NT20 controller 208V, 60Hz, 3 phase
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