Category: Process Subcategory: Plasma Etch, Ashing, Desum, RIE & ICP
Manufacturer: Plasmatherm Model: 700 VLR (Versalock ) PECVD
Equipment Name: Plasmatherm PTI 77002F Configuration: up to 8" wafers
Year: Nov. 6, 1995 Condition: Excellent
Quantity: 1 Availability: In Stock, Immediately
Pricing: Call for Pricing Movie:
Description:
Plasmatherm Versalock PECVD System with (1) LM/TM module (2) PECVD module - 5 MKS Mass Flow Controllers (N2,He, CF4, Silane, spare) RFPP-RF5S RF power supply, Leybold DryVac 50P,Plasmatherm operating software,208V, 60Hz, 3 phase
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