| Cascade Summit 12K Semi-automatic wafer prober,Microchamber,8-inch thermal chuck,AttoGuard Shielding, Temptronic TPO-3000 chiller-controller (-55C to 200C),Femotguard® shielding on wafer chuck,Mitutoyo FS-70 microscope MPlan APO 2X objective lens,Nikon 10X oculars,Windows 2000 OS,Wincal 3.1,Nucleus 2.7 prober control software |