All Items in Database
Process
| Manufacturer | Type | Description |
Picture
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| Plasmatherm - Unaxis | VLR ICP Plasmatherm (3) PMs | Plasmatherm VLR ICP Cassette to Cassette LM/TM with dual end-effectors,(3)VLR ICP module,Configured for 6" dia. wafer with Clamp, PM1 & PM2 configuration:(8) MFCs,VAT PM5 Throttle valve controller, Edwards STP-A-1303CV2 turbo pump with STPA803C/A1303C controller,ENI 600W RF Power supply for lower electrode with AM5 matchwork and tunner, Advanced Energy RFPP 20M RF power supply for upper electrode with AM20 matchwork and tunner,Heated chamber walls with 6 zone controller, Heated vacuum plumbing lines with separate BriskOne controllers. PM3 configuration:configuration:(8) MFCs,VAT PM5 Throttle valve controller, Leybold Mag 1500CT turbo pump with MagDrive 2000 controller,Advanced Energy RF5S 500W Power supply for lower electrode with AM5 matchwork and tunner, Advanced Energy RFPP 20M RF power supply for upper electrode with AM20 matchwork and tunner,Heated chamber walls with 6 zone controller, LM-TM: Single Load lock, Plamatherm Versaworks software, 208V, 30A 60Hz | |
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| Plasmatherm - Unaxis | VLR ICP Plasmatherm (1) PM | Plasmatherm VLR ICP Cassette to Cassette LM/TM with dual end-effectors,(1)VLR ICP module, ESC chuck set up for 6" dia. wafers, (8) MFCs (7) which are Unit 1660 type (N2,He,SF6,O2,N2,N2, BCl3),VAT PM5 Throttle valve controller, Edwards STP-A-1303CV2 turbo pump with controller,ENI RF Power supply for lower electrode with AM5 matchwork and tunner, Advanced Energy RFPP 20M RF power supply for upper electrode with AM20 matchwork and tunner,Plamatherm Versaworks software, 208V, 30A 60Hz | |
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| Plasmatherm-Unaxis | 770 ICP Plasmatherm | Plasmatherm ICP(Ion Coupled Plasma) Etcher Load Lock Shuttle Lock transfer, Model 770,Single chamber ICP, Watlow heater, RFPP – RF5S & 20M power supply, 8.31”electrode, 6" Electrostatic Chuck,(6) MKS MFCs-(O2, N2, Cl2, BCl3,Ar,spare), VAT PM-5,He backside cooling, Neslab 75W,Turbo Pump, Leybold D16B & Leybold D40BCS, Plasmatherm Windows OS | |
Processs
| Manufacturer | Type | Description |
Picture
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| Plasmatherm-Unaxis | Plasmatherm-Unaxis 790 PECVD | Plasmatherm 790 PECVD, non-load lock,11" upper & lower electrode, Seren 500W 13.56Mhz RF power supply matching network, ENI 600W 13.56Mhz RF power supply, Lower electrode heated platen with Watlow controller,(8) MFCs, VAT gate valve,Plasmatherm PC Window based OS, 208V 60Hz, 60A |  |
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