All Items in Database
Process
| Manufacturer | Type | Description |
Picture
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| Oxford | 90 Plus RIE | Reactive Ion Etcher Load lock & main process chamber 6 MFCs -(BCl3, Cl2, CH4, H2, Ar, O2),Pfeiffer Turbo TPH330PC on the Main chamber,Pfeiffer Turbo TMH 260C on the Load Lock,Leybold mechanical pumps, PC & monitor. | |
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