All Items in Database

Metrology

KLA-Tencor	6420 Surfscan	KLA 6420 Surfscan for Non-Patterned wafers, Capable of 3" -8" wafers, Low angle optics,Standard OEM puck,0.10 micron defect Sensitivity @ 95% capture on bare silicon, based on PSL standards,accuracy within 1% based on Tencor approved test specificaitons, 0.02 ppm Haze Sensitivity on Silicon, new Argon Laser,Win98 software,CD ROM writer, NIST Calibrated,new printer, network ready, upgraded electronics package, manuals,XY coordinates,GEM SECS: options available.	Details
KLA-Tencor	4000	Model 4000 Surfscan	Details
KLA-Tencor	6100	Surfscan Capable of up to 200mm wafers Currently configured for 200mm wafers with PA-172 cassettes Red light laser for Non-Patterned Surface Inspection System 0.15 micron Defect Sensitivity @ 95% capture, based on PSL Standards 0.02 ppm Haze Sensitivity 0.002 ppm Haze Resolution Accuracy within 1% using approved VLSI Standard	Details
KLA-Tencor	6100	Surfscan Capable of up to 200mm wafers Currently configured for 200mm wafers with PA-172 cassettes Red light laser for Non-Patterned Surface Inspection System 0.15 micron Defect Sensitivity @ 95% capture, based on PSL Standards 0.02 ppm Haze Sensitivity 0.002 ppm Haze Resolution Accuracy within 1% using approved VLSI Standard	Details
KLA-Tencor	6100	Surfscan Capable of up to 200mm wafers Currently configured for 200mm wafers with PA-172 cassettes Red light laser for Non-Patterned Surface Inspection System 0.15 micron Defect Sensitivity @ 95% capture, based on PSL Standards 0.02 ppm Haze Sensitivity 0.002 ppm Haze Resolution Accuracy within 1% using approved VLSI Standard	Details
KLA-Tencor	6100	Surfscan Capable of up to 200mm wafers Currently configured for 200mm wafers with PA-172 cassettes Red light laser for Non-Patterned Surface Inspection System 0.15 micron Defect Sensitivity @ 95% capture, based on PSL Standards 0.02 ppm Haze Sensitivity 0.002 ppm Haze Resolution Accuracy within 1% using approved VLSI Standard	Details
KLA-Tencor	Quantox	KLA-Tencor Quantox 64100 Wafer capability of 4 - 12" (300mm), Options include: Quick Map, Lifetime, Bulk Recombination, Gate Film Oxide, Software Rev. # 3.2, SECS II/ GEM Communication Interface PC Anywhere Software Kelvin Probe Module 6061 Stainless Steel Chuck FEB Dissociation Light Assembly Pentium CPU with Windows NT Installed Chuck Electronics Module 2nd Cassette Option Cassette Ergo Loaders X/Y drive/controller chassis and motion controller card Wafer handling module Flat Panel Display	Details
KLA-Tencor	Swift Station	Computer for 7700's	Details	None
KLA-Tencor	4500	Surface Contamination Analyser Model # 4500 Non-patterned wafer inspection capable of up to 6” wafers (150mm) Will Configure for 2” wafers capabilities, including 2” pan assembly, realignment, calibration, cassette elevator modification. Sensitivity 0.21um defect detection 0.4 ppm Haze Sensitivity Accuracy within 1% Throughput for 150 mm wafers – 60 wph Color Histograms/bit maps System will meet OEM specifications System will be NIST Calibrated (calibration standards are not included with system) Operators Manual included	Details
KLA-Tencor	AIT1	High Throughput Scanning Patterned wafer Defect Inspection system for 100mm-200mm wafers, sensitivity 0.10um latex spheres on bare silicon and patterned process wafers,high speed air bearing stage, new 30mW Argon laser @488nm, Tencor 3.22 software rev., PRI robot and aligner,xy axis scan, simultaneous multi-channel collection for each channel and variable polarization, programmable spatial filter with variable angle programmable spatial filter.	Details

Equipment Available by Manufacturer: Accurate Gas Control * AG Associates * Agilent * Aixtron * Alcatel * Amerimade * Anritsu * Asyst * ATV * AXIC * Balzers * Bede * Benchmark * Blue M * Brewer Science * Brooks * Canon * CDI * CHA * Cummins * Dynatex * EFD * EFOS * ELAS * Electroglas * Energy Logics * Espec * EVG * F K Delvotec * FiberPro * Fitel * FSI * FTS Systems * Fujikura * Glenn * HP/Agilent * JEOL * Karl Suss * Keithley * KLA-Tencor * Kulicke Soffa * Laurell * Leybold * Liebert * Logitech * Loomis * March * Maxsys * MEI * MKS * Nanometrics * Neslab * Newport * Nikon * OAI * Olympus * Oxford * PlasmaTherm * Revco * Reynoldstech * Rucker Kolls * Rudolph * SCI * SemiGas * Semitool * Sloan * Solitec * SSEC * Stanford Research * Strasbaugh * STS * Sumitomo * Superior Automation * SVG * Sysmax * Tegal * Tektronix * Thibert Engineering * TMC * Tylan * U.S. Filter * Unaxis * Veeco * Verteq * Viewna * Wentworth * Weslan * Westbond * Wild * Xandex * Yes * York * Zeiss * Zellweger *

Direct Source Surplus, LLC • 5101 Deerchase Trail • Wake Forest, NC 27587
Email eric@dssurplus.com • Phone: (919) 556-8930 • Fax: (919) 562-2165